Mass Flow Meter / Controller

What is a mass flow meter?

A low flow mass flow meter (MFM) measures the mass flow rate of a fluid (gas or liquid) passing through a system, typically in ranges from milliliters per minute (mL/min) to a few liters per minute (L/min). Unlike volumetric flow meters, mass flow meters account for fluid density, providing direct mass flow readings essential for processes requiring precise stoichiometry or compliance with environmental regulations.

What is a mass flow controller?

A low flow mass flow controller (MFC) combines a mass flow meter with a control valve and feedback system to regulate flow rates in real time. It adjusts the valve position to maintain a user-defined setpoint, ensuring consistent delivery even under fluctuating pressures or temperatures.

1. Ultra-Low Flow Detection with High Accuracy: Designed for precise control of micro to low flow rates, our mass flow meters and controllers deliver accurate measurement from as low as 0.1 sccm.
2. Multi-Fluid, Multi-Range, and Multi-Principle Flexibility: We offer various sensor principles, including Coriolis, Thermal Mass, and Differential Pressure, to meet different precision, flow rate, and application requirements.
3. Fast Response and Stable Control: With a control response time under 1 second, our controllers ensure real-time flow regulation.
4. Compact Design for Easy Integration: Our low flow mass flow meters/controllers come in a compact, modular form factor, making them easy to integrate into analytical instruments, automated systems, and compact gas panels.

Comparison of the Mass Flow Meters / Controllers above

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